Fundamentals of semiconductor manufacturing and process control
"Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modelling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts." "Graduate-level students and industrial practitioners will benefit from the detailed examination of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment."--Jacket
eBook, English, ©2006
IEEE ; Wiley-Interscience, [Piscataway], Hoboken, N.J., ©2006