Manufacturing Techniques for Microfabrication and Nanotechnology
Lithography: Photolithography. Next-Generation Lithographies and Lithography Research. Pattern Transfer with Subtractive Techniques: Dry Etching. Wet Chemical Etching and Wet Bulk Micromachining-Pools as Tools. Thermal Energy-Based Removing. Mechanical Energy-Based Removing. Pattern Transfer with Additive Techniques: Physical and Chemical Vapor Deposition-Thin Film Properties and Surface Micromachining. Chemical, Photochemical and Electrochemical Forming Techniques. Thermal Energy-Based Forming Techniques-Thermoforming. Micro-Molding Techniques-LIGA
eBook, English, 2011
CRC Press, Hoboken, 2011