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WorldCat.org

本书内容包括真空技术基础, 薄膜制备, 微细加工, 薄膜材料及应用等4大部分, 涉及薄膜技术与薄膜材料的各个方面, 知识全面, 脉络清晰

薄膜技术与薄膜材料